TOC Destruction For Semiconductor Industries


Reduction of Total Organic Carbon (TOC) in water is critical for the microelectronics, in pharmaceutical industries, food and beverage, processing wastewater and power generation industries, where even the smallest of contaminants can affect the products, their performance and enable the microorganism that feeds on these organic impurities to spread.

Due to the low penetration depth of the 185nm light, the efficiency of the TOC reactors depends on the hydraulic conditions. The ULTRAAQUA UV TOC reactors have been optimized through a combined chemical process and CFD modeling approach.

For an additional improved efficiency, the ULTRAAQUA UV TOC reactors can be combined with the addition of other oxidants like e.g. hydrogen peroxide and ozone.

TOC reduction requires the use of higher UV energy level created at 185nm wavelength. TOC lamps simultaneously emit light at 254nm wavelength ensuring combined disinfection and oxidation.

ULTRAAQUA UV uses UV lamps emitting light at 185nm wavelength (this light has more energy than the 254nm used in UV water disinfection applications). This light energy promotes the formation of OH-radicals from photolysis of water. The OH-radicals react with the organic matter in the water leading to the oxidation into CO2 (carbon dioxide) and H2O (water) and resulting in the removal of TOC.

If you are interested in TOC removal from your processes, please do not hesitate to ask our sales engineers at

You may also download our TOC removal brochure here